Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Reexamination Certificate
2007-08-31
2010-06-22
Thomas, Eric (Department: 2831)
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
C361S290000
Reexamination Certificate
active
07742275
ABSTRACT:
A capacitive device including at least one actuator structure formed on a substrate is provided. The capacitive device further includes a moveable structure formed on the substrate and mechanically coupled to the at least one actuator structure. The moveable structure includes a moveable capacitive plate and a bridge, formed substantially planar to the moveable capacitive plate. The bridge is used to mechanically and electrically couple the moveable capacitive plate to a signal line formed on the substrate such that the moveable capacitive plate moves up or down based on a force generated by the at least one actuator structure.
REFERENCES:
patent: 6507475 (2003-01-01), Sun
patent: 7151425 (2006-12-01), Park et al.
patent: 2005/0156694 (2005-07-01), Park et al.
patent: 2007/0025050 (2007-02-01), Shimanouchi et al.
patent: 2007/0094864 (2007-05-01), Park et al.
patent: WO 2005117042 (2005-12-01), None
Lee, Hee-Chui et al.: “Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches”; Journal of Micromechanics and Microengineering; 2005; pp. 2098-2104; Institute of Physics Publishing; UK.
Freescale Semiconductor Inc.
Thomas Eric
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