MEMS capacitive bending and axial strain sensor

Details MEMS capacitive bending and axial strain sensor MEMS capacitive bending and axial strain sensor

2009-02-26

2010-12-21

Caputo, Lisa M (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

C073S775000, C073S777000

Reexamination Certificate

active

07854174

ABSTRACT:
A three-dimensional micro-electro-mechanical-systems (MEMS) capacitive bending and axial strain sensor capacitor is described. Two independent comb structures, incorporating suspended polysilicon interdigitated fingers, are fabricated simultaneously on a substrate that can displace independently of each other while attached to a substrate undergoing bending or axial deformation. A change in spacing between the interdigitated fingers will output a change in capacitance of the sensor and is the primary mode of operation of the device. On the bottom and to the end of each comb structure, a glass pad is attached to the comb structure to allow for ample surface area for affixing the sensor to a substrate. During fabrication, tethers are used to connect each comb structure to maintain equal spacing between the fingers before attachment to the substrate. After attachment, the tethers are broken to allow independent movement of each comb structure.

REFERENCES:
patent: 4188651 (1980-02-01), Dornfeld et al.
patent: 4941363 (1990-07-01), Doemens et al.
patent: 5491604 (1996-02-01), Nguyen et al.
patent: 5537083 (1996-07-01), Lin et al.
patent: 5610528 (1997-03-01), Neely et al.
patent: 5723353 (1998-03-01), Muenzel et al.
patent: 5750904 (1998-05-01), Doemens et al.
patent: 5827980 (1998-10-01), Doemens et al.
patent: 5839062 (1998-11-01), Nguyen et al.
patent: 5918280 (1999-06-01), Gang et al.
patent: 5955932 (1999-09-01), Nguyen et al.
patent: 6236281 (2001-05-01), Nguyen et al.
patent: 6266226 (2001-07-01), Hayashi
patent: 6532824 (2003-03-01), Ueno et al.
patent: 6606913 (2003-08-01), Gianchandani
patent: 6629461 (2003-10-01), Behin et al.
patent: 6914323 (2005-07-01), Curtis et al.
patent: 7035083 (2006-04-01), Lin et al.
patent: 7085122 (2006-08-01), Wu et al.
patent: 2002/0092340 (2002-07-01), Prater et al.
patent: 2004/0183177 (2004-09-01), Curtis et al.
Silver Conductive Epoxy. Catalog #8331-14G. Product sheet accessed online at <www.mgchemicals.com/products/8331.html>. Published online on Jul. 21, 2004.
Gianchandani, Y.B. et al., “Bent-Beam Strain Sensors,” Journal of Microelectromechanical Systems, vol. 5(1)(Mar. 1996) pp. 52-58.
Guo, J. et al., “Buckled Beam Linear Output Capacitive Strain Sensor,” Solid-State Sensor, Actuator and Mircrosystems Workshop, Hilton Head Island, USA (Jun. 6-10, 2004) pp. 344-347.
“Micromachined Devices and Fabrication Technologies,” J. Webster (ed.), Wiley Encyclopedia of Electrical and Electronics Engineering, John Wiley & Sons, Inc. (1999) pp. 648-665.

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