Optical: systems and elements – Optical modulator – Light wave directional modulation
Reexamination Certificate
2006-09-12
2006-09-12
Dang, Hung Xuan (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave directional modulation
Reexamination Certificate
active
07106493
ABSTRACT:
A valve device formed of MEMS devices includes a generally-planar semiconductor substrate having one or more apertures to provide passages for fluids, gases, or light. Movable gate elements alternately cover or expose such apertures to either block or open such passages. Actuators in the form of miniature electromagnets repel or attract the gate elements to open or close the passages. The valve device may be used to control fluid delivery systems dispensing pressurized fluid, or in aspiration systems used to suction fluids. Alternatively, the gate elements may serve as light valves for selectively passing light from a light source through the substrate to a light-responsive surface.
REFERENCES:
patent: 4283259 (1981-08-01), Melcher et al.
patent: 4598197 (1986-07-01), Morita et al.
patent: 5062689 (1991-11-01), Koehler
patent: 5109149 (1992-04-01), Leung
patent: 5298939 (1994-03-01), Swanson et al.
patent: 5451489 (1995-09-01), Leedy
patent: 5459098 (1995-10-01), Maya
patent: 5607601 (1997-03-01), Loper et al.
patent: 5654127 (1997-08-01), Leedy
patent: 5691541 (1997-11-01), Ceglio et al.
patent: 5781331 (1998-07-01), Carr et al.
patent: 5808384 (1998-09-01), Tabat et al.
patent: 5835195 (1998-11-01), Gibson et al.
patent: 6114794 (2000-09-01), Dhuler et al.
patent: 6121626 (2000-09-01), Lin
Pain, Stephen W., “Magnificent MEMS,”Computer Shopper, Jun. 1998, pp. 466-467, 472.
Löchel, B., et al., “Ultraviolet Depth Lithography and Galvanoforming for Micromachining,”Journal of the Electrochemical Society, Electrochemical Society, Manchester, NH, U.S., vol. 143, No. 1, 1996, pp. 237-244.
Kawahito, Shoji, et al., “High-resolution micro-fluxgate sensing elements using closely coupled coil structures,”Sensors and Actuators A, vol. 54, 1996, pp. 612-617.
Cahill von Hellens & Glazer, P.L.C.
Dang Hung Xuan
Tra Tuyen
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