MEMS-based sensor for lubricant analysis

Chemical apparatus and process disinfecting – deodorizing – preser – Analyzer – structured indicator – or manipulative laboratory... – Means for analyzing liquid or solid sample

Reexamination Certificate

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C436S150000, C324S698000

Reexamination Certificate

active

07541004

ABSTRACT:
A fluid contamination analyzer employs one or more MEMS-based sensors. The sensors are incorporated into probes or alternatively may be employed in an in-line analyzer residing in the fluid. The sensors, which can be selective to detect a distinct contaminant within the fluid, sense an impedance of the fluid, which is a function of its contamination and communicates the impedance to analysis circuitry.

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