MEMS-based multi-channel Fabry-Perot interferometer system...

Optical waveguides – With optical coupler – Plural

Reexamination Certificate

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C385S147000, C359S308000

Reexamination Certificate

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07844145

ABSTRACT:
A system includes a first Fabry-Perot interferometry channel and a second Fabry-Perot interferometry channel serially and optically coupled to the first Fabry-Perot interferometry channel. One channel of the first and second Fabry-Perot interferometry channels has a greater tuning range than the other channel of the first and second Fabry-Perot interferometry channels. The Fabry-Perot interferometry channel having the lesser tuning range has a greater tuning precision than the Fabry-Perot interferometry channel having the greater tuning range. The system may be included in a MEMS-based system, such as a MEMS spectrometer.

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