MEMS based current sensor using magnetic-to-mechanical...

Details MEMS based current sensor using magnetic-to-mechanical... MEMS based current sensor using magnetic-to-mechanical...

2006-08-18

2008-12-16

Tang, Minh N (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With coupling means

C324S11700H

Reexamination Certificate

active

07466121

ABSTRACT:
A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

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