MEMS based conductivity-temperature-depth sensor for harsh...

Details MEMS based conductivity-temperature-depth sensor for harsh... MEMS based conductivity-temperature-depth sensor for harsh...

2006-04-19

2008-11-25

Nguyen, Vincent Q. (Department: 2831)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S446000, C073S721000

Reexamination Certificate

active

07456638

ABSTRACT:
A MEMS-based silicon CTD sensor for ocean environment is presented. The sensor components are a capacitive conductivity sensor, a gold doped silicon temperature sensor, and a multiple diapghram piezoresistive pressure sensor. The sensor elements have further been packaged to protect them from harsh marine environment. The sensor components showed good linear response, resolution and mechanical integrity to the harsh ocean environment.

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