MEMS-based alignment of optical components

Details MEMS-based alignment of optical components MEMS-based alignment of optical components

2005-09-13

2008-07-22

Spector, David N. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S295000

Reexamination Certificate

active

07403322

ABSTRACT:
A MEMS device that enables an optical subsystem (e.g., an optical switch) having an optical component optically coupled to the MEMS device via free space to achieve optical alignment between the optical component and the MEMS device without moving the optical component with respect to the stationary part of the MEMS device. In one embodiment, a MEMS device of the invention has a stationary part and a movable part movably connected to the stationary part. The movable part has a platform and a plurality of mirrors mounted on the platform, wherein (i) each mirror is adapted to move with respect to the platform independent of other mirrors and (ii) the platform is adapted to move with respect to the stationary part together with the mirrors.

REFERENCES:
patent: 5319511 (1994-06-01), Lin
patent: 5501893 (1996-03-01), Learmer et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 6201631 (2001-03-01), Greywall
patent: 6498870 (2002-12-01), Wu et al.
patent: 6667823 (2003-12-01), Greywall
patent: 6850354 (2005-02-01), Greywall
patent: 6876484 (2005-04-01), Greywall
patent: 6924581 (2005-08-01), Greywall
patent: 7119942 (2006-10-01), Nathanson et al.
patent: 2005/0134955 (2005-06-01), Greywall et al.
patent: 2005/0157376 (2005-07-01), Huibers et al.
patent: 2005/0174624 (2005-08-01), Greywall
“Wavelength-Selective 1 χ K Switches Using Free-Space Optics and MEMS Micromirrors: Theory, Design, and Implementation,” by Dan M. Marom et al., J. Lightwave Technology, 2005, vol. 23 1620-1630.
U.S. Appl. No. 10/796,618, filed Mar. 9, 2004.
U.S. Appl. No. 11/095,071, filed Mar. 31, 2005.

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