Optical waveguides – With optical coupler – With alignment device
Reexamination Certificate
2007-02-13
2007-02-13
Healy, Brian (Department: 2883)
Optical waveguides
With optical coupler
With alignment device
C385S016000, C385S023000, C385S025000, C257S315000
Reexamination Certificate
active
10792982
ABSTRACT:
Electrets are used in a variety of MEMS-based actuator devices. The electret is able to store electrical charge for a long time with negligible charge leakage. Therefore, when an electret is incorporated into a MEMS device that requires actuation, the device can be initially biased to any desired actuation state for a long period of time without the use of external bias voltages. Such a MEMS-based device may include a MEMS-based actuator having at least a first deflectable member and at least a second member. The first deflectable member and the second member are provided with a floating electrode and a second electrode. A charge on the first floating electrode is selected so as to position the first deflectable member at a desired separation distance from the second member. The device may be used to align an optical component or to change the electrical characteristics of an electrical element.
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Healy Brian
Peng Charlie
Rosemount Inc.
Westman Champlin & Kelly P.A.
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