MEMS and MEMS components from silicon kerf

Details MEMS and MEMS components from silicon kerf MEMS and MEMS components from silicon kerf

2005-01-04

2005-01-04

Mai, Ngoclan T. (Department: 1742)

Powder metallurgy processes

Powder metallurgy processes with heating or sintering

Powder pretreatment

C419S038000, C423S324000

Reexamination Certificate

active

06838047

ABSTRACT:
The disclosure describes an economical and environmentally benign method for using crystalline silicon metal kerf recovered from wiresaw slurries towards the fabrication of complex MEMS and MEMS components, including MEMS packages, with improved design features.

REFERENCES:
patent: 4261781 (1981-04-01), Edmonds et al.
patent: 4375453 (1983-03-01), Nalewajek et al.
patent: 4515755 (1985-05-01), Matsuo et al.
patent: 5830369 (1998-11-01), Toyama
patent: 6059118 (2000-05-01), Ding et al.
patent: 6113473 (2000-09-01), Costantini et al.
patent: 6702994 (2004-03-01), Henriksen et al.
patent: 10182124 (1998-07-01), None

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