MEMS actuators and switches

Details MEMS actuators and switches MEMS actuators and switches

2007-03-16

2009-10-13

Enad, Elvin G (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07602266

ABSTRACT:
Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation.

REFERENCES:
patent: 5796152 (1998-08-01), Carr et al.
patent: 5962949 (1999-10-01), Dhuler et al.
patent: 6236300 (2001-05-01), Minners
patent: 7312678 (2007-12-01), Ning et al.
patent: 2004/0261412 (2004-12-01), Hickey
patent: 2007/0170811 (2007-07-01), Rubel

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