Power plants – Motor operated by expansion and/or contraction of a unit of... – Mass is a solid
Reexamination Certificate
2006-05-02
2006-05-02
Nguyen, Hoang (Department: 3748)
Power plants
Motor operated by expansion and/or contraction of a unit of...
Mass is a solid
C060S528000
Reexamination Certificate
active
07036312
ABSTRACT:
The MEMS cantilever actuator is designed to be mounted on a substrate. The actuator comprises an elongated hot arm member having two spaced-apart portions, each provided at one end with a corresponding anchor pad connected to the substrate. The portions are connected together at a common end that is opposite the anchor pads. It further comprises an elongated cold arm member adjacent to and substantially parallel of the hot arm member, the cold arm member having at one end an anchor pad connected to the substrate, and a free end that is opposite the anchor pad thereof. A dielectric tether is attached over the common end of the portions of the hot arm member and the free end of the cold arm member. This MEMS actuator allows improving the performance, reliability and manufacturability of MEMS switches.
REFERENCES:
patent: 6268635 (2001-07-01), Wood
patent: 6407478 (2002-06-01), Wood et al.
patent: 6608714 (2003-08-01), Hanson et al.
patent: 6655964 (2003-12-01), Fork et al.
patent: 6679055 (2004-01-01), Ellis
patent: 6691513 (2004-02-01), Kolesar
patent: 6708491 (2004-03-01), Weaver et al.
patent: WO 02/17339 (2002-02-01), None
patent: WO 02/23565 (2002-03-01), None
Burns D M et al Design and Performance of a double hot arm polysilicon thermal Actuator—XP009024459, no date.
Kolesar E S et al Design and Performance of a Polysilicon Surface Micromachined, no date.
Microengine realized with arrays of Asymmetrical electrothermal microactuators—XP001157164.
Lassonde Normand
Menard Stephane
Villeneuve Jean-Claude
Keefer Timothy J.
Nguyen Hoang
Seyfarth Shaw LLP
Simpler Networks Inc.
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