MEMS actuator and relay with vertical actuation

Details MEMS actuator and relay with vertical actuation MEMS actuator and relay with vertical actuation

2007-05-25

2009-10-06

Enad, Elvin G (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07598829

ABSTRACT:
A micro-electromechanical (MEMS) actuator and relay are implemented using a copper coil and a magnetic core. The magnetic core includes a base section that lies within the copper coil, and a cantilever section that lies outside of the copper coil. The presence of a magnetic field in the coil causes the cantilever section to move vertically away from a rest position, while the absence of the magnetic field allows the cantilever section to return to the rest position.

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