MEMS actuator and relay with horizontal actuation

Details MEMS actuator and relay with horizontal actuation MEMS actuator and relay with horizontal actuation

2007-05-25

2009-10-13

Enad, Elvin G (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07602267

ABSTRACT:
A micro-electromechanical (MEMS) actuator and relay are implemented using a copper coil and a magnetic core. The magnetic core includes a base section that lies within the copper coil, and a cantilever section that lies outside of the copper coil. The presence of a magnetic field in the coil causes the cantilever section to move horizontally away from a rest position, while the absence of the magnetic field allows the cantilever section to return to the rest position.

REFERENCES:
patent: 5578976 (1996-11-01), Yao
patent: 5880921 (1999-03-01), Tham et al.
patent: 6016092 (2000-01-01), Qiu et al.
patent: 6094116 (2000-07-01), Tai et al.
patent: 6169826 (2001-01-01), Nishiyama et al.
patent: 6360036 (2002-03-01), Couillard
patent: 6469602 (2002-10-01), Ruan et al.
patent: 6573822 (2003-06-01), Ma et al.
patent: 6842558 (2005-01-01), Mitsuoka et al.
patent: 7095919 (2006-08-01), Kawamoto et al.
patent: 7202763 (2007-04-01), Six
patent: 7327211 (2008-02-01), Ruan et al.
patent: 7381663 (2008-06-01), Sato et al.
patent: 7444042 (2008-10-01), Niblock et al.
patent: 7464459 (2008-12-01), Niblock et al.
patent: 2003/0030998 (2003-02-01), Mhani et al.
patent: 2004/0001667 (2004-01-01), Childers
patent: 2004/0022484 (2004-02-01), Sigloch et al.
Gary D. Gray Jr., et al. “Magnetically Bistable Actuator Part 2. Fabrication and Performance”, Sensors and Actuators A: Physical, vol. 119, Issue 2, Apr. 13, 2005, pp. 502-511.
Gary D. Gray Jr. and Paul A. Kohl, “Magnetically Bistable Actuator Part 1. Ultra-Low Switching Energy And Modeling”, Sensors and Actuators A: Physical, vol. 119, Issue 2, Apr. 13, 2005, pp. 489-501.
John A. Wright, et al., “Micro-Miniature Electromagnetic Switches Fabricated Using MEMS Technology”, Proceedings: 46th Annual International Relay Conference: NARM '98, Oak Brook, Illinois, Apr. 1998, pp. 13-1 to 13-4.
Han S. Lee, et al., “Micro-Electro-Mechanical Relays—Design Concepts and Process Demonstrations”, Joint 22nd International Conference on Electrical Contacts and 50th IEEE HOLM Conference on Electrical Contacts, Sep. 20-23, 2004, pp. 242-247.
J.H. Fabian, et al., “Maxtrix Combination of MEMS Relays”, 17th IEEE International Conference on Micro Electro Mechanical Systems, 2004, pp. 861-864.
Ernst Thielicke and Ernst Obermeier, “A Fast Switching Surface Micromachined Electrostatic Relay”, The 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, Jun. 8-12, 2003, pp. 899-902.
Ren Wanbin, et al., “Finite Element Analysis of Magnetic Structures for Micro-Electro-Mechanical Relays”, Proceedings of the 51st IEEE HOLM Conference on Electrical Contacts, Sep. 26-28, 2005, pp. 265-269.
John A. Wright, et al., “Magnetostatic MEMS Relays For The Miniaturization Of Brushless DC Motor Controllers”, 12th IEEE International Conference on Micro Electro Mechanical Systems, Jan. 17-21, 1999, pp. 594-599.
U.S. Appl. No. 11/805,933, filed May 25, 2007, Niblock et al.
U.S. Appl. No. 11/805,955, filed May 25, 2007, Niblock et al.
U.S. Appl. No. 11/807,161, filed May 25, 2007, Niblock et al.
U.S. Appl. No. 11/807,162, filed May 25, 2007, Niblock et al.
U.S. Appl. No. 11/805,933, filed May 25, 2007 to Niblock et al. See attached IDS Letter for relevance.
U.S. Appl. No. 11/807,162, filed May 25, 2007 to Niblock et al. See attached IDS Letter for relevance.
U.S. Appl. No. 11/807,161, filed May 25, 2007 to Niblock et al. See attached IDS Letter for relevance.
U.S. Appl. No. 11/805,955, filed May 25, 2007 to Niblock et al. See attached IDS Letter for relevance.
U.S. Appl. No. 12/283,969, filed Sep. 17, 2008 to Niblock et al. See attached IDS Letter for relevance.
U.S. Appl. No. 11/805,933 filed on May 25, 2007 to Niblock et al.
U.S. Appl. No. 11/807,162 filed on May 25, 2007 to Niblock et al.
U.S. Appl. No. 12/283,969 filed on Sep. 17, 2008 to Niblock et al.
John A. Wright, et al., “Micro-Miniature Electromagnetic Switches Fabricated Using MEMS Technology,” Proceedings: 46th Annual International Relay Conference:NARM '98, Oak Brook, Illinois, Apr. 1998, pp. 13-1 to 13-4.

Affiliated with

Also associated with

Rating

MEMS actuator and relay with horizontal actuation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS actuator and relay with horizontal actuation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS actuator and relay with horizontal actuation will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4067595