MEMS actuator

Details MEMS actuator MEMS actuator

2007-09-29

2010-06-08

Enad, Elvin G (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000, C060S527000

Reexamination Certificate

active

07733200

ABSTRACT:
Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

REFERENCES:
patent: 6211598 (2001-04-01), Dhuler et al.
patent: 6407478 (2002-06-01), Wood et al.
patent: 6483419 (2002-11-01), Weaver et al.
patent: 6549107 (2003-04-01), Lim et al.
patent: 6708491 (2004-03-01), Weaver et al.
patent: 7036312 (2006-05-01), Menard et al.
patent: 7471184 (2008-12-01), Aksyuk et al.
patent: 2005/0189204 (2005-09-01), Yeatman et al.
patent: 2006/0238279 (2006-10-01), Lu et al.
patent: 2007/0170811 (2007-07-01), Rubel
patent: 2008/0061387 (2008-03-01), Pardo
Jan. 2004, Agrawal, Vivek, “A Latching MEMS Relay for DC and RF Applications,” Proceedings of the 50th IEEE Holm Conference on Electrical Contacts and the 22ndInternational Conference on Electrical Contacts, pp. 222-225.
Feb. 2002, “NANO SU-8 Negative Tone Photoresist Formulations 50-100”, (Micro-Chem, 1254 Chestnut St., Newton, Mass.), pp. 1-4.
Jan. 2003, Qiu et al., “A High-Current Electrothermal Bistable MEMS Relay,” MEMS-03 Kyoto, The 16thAnnual Int'l Conference on Micro Electro Mechanical Systems, pp. 64-67; and abstract.
Sep. 2004, Yeatman et al., “Performance and Analysis of Thermally Tripped MEMS Circuit Breakers,” MicroMechanics Europe 2004, Leuven, Belgium, pp. 295-298.
2005, Siahmakoun, et al., “Variable Optical Delay Prototype Using a 2D Array of MEMS Mirrors,” Optical MEMS and Their Applications Conference. IEEE/LEOS International Conference on Oulu, Finland, Aug. 1-4, 2005, Piscataway, NJ, USA, IEEE Aug. 1, 2005, pp. 55-56.

Affiliated with

Also associated with

Rating

MEMS actuator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS actuator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS actuator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4226901