MEMS acoustic filter and fabrication of the same

Details MEMS acoustic filter and fabrication of the same MEMS acoustic filter and fabrication of the same

2006-08-03

2009-11-03

Tran, Anh Q (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S187000, C333S193000

Reexamination Certificate

active

07612635

ABSTRACT:
A MEMS acoustic filter has a MEMS resonator and at least two acoustic I/O ports to alter an input acoustic signal to an output acoustic signal. The first I/O port is adapted for interfacing with a medium, and the second I/O port for passing an acoustic signal to an acoustic transducer. Multiple MEMS resonators may be stacked to form a high order acoustic filter. An array of MEMS acoustic filters may be designed to function as an acoustic lens. The MEMS acoustic filter is particularly useful with an ultrasonic transducer, such as PZT and MUT. Fabrication methods to make the same are also disclosed.

REFERENCES:
patent: 6271620 (2001-08-01), Ladabaum
patent: 2002/0041220 (2002-04-01), Nguyen

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