Data processing: measuring – calibrating – or testing – Testing system – Of circuit
Reexamination Certificate
2006-07-11
2006-07-11
Bui, Bryan (Department: 2863)
Data processing: measuring, calibrating, or testing
Testing system
Of circuit
C702S185000
Reexamination Certificate
active
07076390
ABSTRACT:
An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network, and process the data to produce reports. Each process node includes memory sufficient to buffer the data until it can process the data. Each process node has an interface card that formats the data for a high speed interface bus that is coupled to the interface card. A computer receives and processes the data to produce the report. A second network receives the reports. A job manager is coupled to the second network, receives the reports, and sends information to the process nodes to coordinate processing of the data.
REFERENCES:
patent: 2004/0008867 (2004-01-01), Fein et al.
patent: 2005/0249395 (2005-11-01), Miller
Bhaskar Krishnamurthy
Bubna Kishore
Lin Jason Z.
Miller Lawrence R.
Rosengaus Eliezer
Bui Bryan
KLA-Tencor Technologies Corporation
Luedeka Neely & Graham P.C.
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