Membrane with perforations, method for producing such a membrane

Details Membrane with perforations, method for producing such a membrane Membrane with perforations, method for producing such a membrane

1987-12-21

1989-07-04

Tufariello, T. M.

Chemistry: electrical and wave energy

Processes and products

C25D 1078

Patent

active

048447781

ABSTRACT:
Described, is a membrane and its method of manufacturing which membrane is an electroformed metal foil having areas of high perforation density (higher than 150000/cm.sup.2) and unperforated areas and in particular also unperforated areas having greater thickness than the other areas.
The membrane is produced in a process comprising a two step photolithographic procedure in which canals formed in the first photolithographic step are used to ensure good vacuum contact during the second photolitographic step in which the high density pattern is formed in the photolacquer used.
The invention also relates to a separation device incorporating one or more membranes according to the invention.

REFERENCES:
patent: 3402110 (1968-09-01), Scherrer
patent: 3498891 (1970-03-01), Futterer
patent: 4496434 (1985-01-01), Morssinkhof
patent: 4575406 (1986-03-01), Slafer

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