Membrane with bumps, method of manufacturing the same, and...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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11244138

ABSTRACT:
Provided is a membrane with bumps whose variations in shape are minimized to a least extent and which are capable of supporting a micro electrical circuit. The membrane with bumps includes: a plurality of bumps, each of which is made up of a probe and an electrode, with the probe having a diameter which becomes smaller from one end toward another end of the probe, and with the electrode having a diameter which is larger than the diameter of the one end of the probe; and an insulating base where the bumps are positioned at predetermined locations so that the bumps are insulated from each other, wherein the probe is positioned, penetrating the insulating base in a thickness direction, and a metal film is placed between the electrode and the insulating base.

REFERENCES:
patent: 6297658 (2001-10-01), Nakata et al.
patent: 6406991 (2002-06-01), Sugihara
patent: 2003/0020502 (2003-01-01), Sugihara et al.
patent: 2004/0046582 (2004-03-01), Sugihara
patent: 6-232222 (1994-08-01), None
patent: 8-235935 (1996-09-01), None
patent: 3098130 (2000-08-01), None
patent: 2005-172509 (2005-06-01), None

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