Membrane probing system

Details Membrane probing system Membrane probing system

2007-09-11

2007-09-11

Chang, Richard (Department: 3726)

Metal working

Method of mechanical manufacture

Electrical device making

C029S846000, C029S876000, C029S882000, C029S426100

Reexamination Certificate

active

11036739

ABSTRACT:
A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.

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