Membrane probe with automatic contact scrub action

Details Membrane probe with automatic contact scrub action Membrane probe with automatic contact scrub action

1988-09-28

1990-04-17

Strecker, Gerard R.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, 324 725, G01R 1067

Patent

active

049183834

ABSTRACT:
An apparatus [10] for providing an automatic lateral scrubbing motion when a test membrane [22] engages a device under test (DUT) (not shown). Included are a fixed length flexure pivot assembly [30] and a pair of variable length flexure pivot assemblies [38]. Signal traces, signal trace terminals, and contact bumps [23, 25, 60] are formed for communicating electrical signals between the apparatus [10] and the DUT. A membrane [22] is stretched and configured for carrying the signal traces, signal trace terminals, and contact bumps [23, 25 and 60]. A hexagonal translation stage [28] is formed with an upper surface [29] disposed for being coupled to at lesat one of the fixed and variable length flexure pivot assemblies [30 and 38], and formed with a lower surface [54]. Surface [54] is formed to define an aperture [51] through itself, formed for securing over itself the membrane [22] when stretched; it is disposed for being coupled to membrane [22]. Finally included is a carrier [12], formed for suspending the hexagonal translation stage [28] and fixed and variable length flexure pivot assemblies [30 and 38].

REFERENCES:
patent: 3911361 (1975-10-01), Bove et al.
patent: 4035723 (1977-07-01), Kvaternik
patent: 4151465 (1979-04-01), Lenz
patent: 4636722 (1987-01-01), Ardezzone

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