Membrane optical waveguide device and method of fabrication

Details Membrane optical waveguide device and method of fabrication Membrane optical waveguide device and method of fabrication

1996-12-17

1998-02-24

Ngo, John

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

385132, 385131, 385 14, G02B 610

Patent

active

057218013

ABSTRACT:
A method of manufacturing an optical waveguide device. The method involves removing a portion of an upper cladding layer 110 from above a waveguide 106 and depositing a temporary spacer layer 114 in place of the removed upper cladding 110. A metal membrane 116 is deposited and patterned over the temporary spacer layer 114 and the temporary spacer 114 is removed, leaving the metal membrane 116 suspended over the waveguide 106. When a voltage differential is applied between the metal membrane 116 and electrodes 108 formed on a lower cladding 102, the metal membrane 116 is collapsed against the waveguide 106, attenuating any light transmitted by the waveguide 106.

REFERENCES:
patent: 5178728 (1993-01-01), Boysel et al.
patent: 5199088 (1993-03-01), Magel
patent: 5278925 (1994-01-01), Boysel et al.
patent: 5404412 (1995-04-01), Seino et al.
patent: 5418883 (1995-05-01), Eda
patent: 5559912 (1996-09-01), Agahi et al.

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