Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate
2008-05-06
2008-05-06
McNeil, Jennifer C. (Department: 1775)
Stock material or miscellaneous articles
Composite
Of silicon containing
C428S450000, C428S701000, C428S702000
Reexamination Certificate
active
10832428
ABSTRACT:
By performing epitaxial growth on a semiconductor substrate while keeping conformity, a membrane multi-layer structure showing increased polarization is provided.A membrane multi-layer structure comprising a thin layer composed of zirconium oxide as the main component for allowing epitaxial growth, a thin layer having a simple perovskite structure, showing in-plane rotation by 45° of the (001) plane to the thin layer composed of zirconium oxide as the main component and performing epitaxial growth, and an intermediate layer provided between the thin layer composed of zirconium oxide as the main component and the thin layer having a simple perovskite structure.
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Kondo Masao
Kurihara Kazuaki
McNeil Jennifer C.
Speer Timothy M.
Westerman Hattori Daniels & Adrian LLP
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