Membrane-like filter element for chemical mechanical polishing s

Details Membrane-like filter element for chemical mechanical polishing s Membrane-like filter element for chemical mechanical polishing s

1998-04-17

2000-01-18

Drodge, Joseph W.

Liquid purification or separation

Processes

Separating

2104931, 210499, 451 60, 451446, B01D 3700, B24B 100, B24B 5700

Patent

active

060154993

ABSTRACT:
A filter media for physically separating agglomerations of abrasive particles from a chemical-mechanical polishing (CMP) process slurry stream. The media is provided as being formed of at least one fabric sheet having a first and second surface defining a first thickness dimension of the sheet therebetween, with the fabric being woven of polymeric monofilament fibers. In service, the slurry stream is supplied to the first side of the filter media, and is passed through the media to the second side thereof such that at least a substantial portion of the agglomerations of abrasive particles are retained on the first side of the media.

REFERENCES:
patent: 3852134 (1974-12-01), Bean
patent: 4025679 (1977-05-01), Denny
patent: 4056476 (1977-11-01), Mouwen et al.
patent: 4104170 (1978-08-01), Nedza
patent: 4225642 (1980-09-01), Hirakawa
patent: 4663041 (1987-05-01), Miyagi et al.
patent: 4728394 (1988-03-01), Shinjou et al.
patent: 4734208 (1988-03-01), Pall et al.
patent: 4765915 (1988-08-01), Diehl
patent: 4770785 (1988-09-01), Schaupert
patent: 4791144 (1988-12-01), Nagou et al.
patent: 4795559 (1989-01-01), Shinjou et al.
patent: 4863604 (1989-09-01), Lo et al.
patent: 4954142 (1990-09-01), Carr et al.
patent: 5084071 (1992-01-01), Nenadic et al.
patent: 5130134 (1992-07-01), Noddin et al.
patent: 5133878 (1992-07-01), Gsell et al.
patent: 5154827 (1992-10-01), Ashelin et al.
patent: 5225014 (1993-07-01), Ogata et al.
patent: 5232875 (1993-08-01), Tuttle et al.
patent: 5264010 (1993-11-01), Brancaleoni et al.
patent: 5275743 (1994-01-01), Miller et al.
patent: 5314843 (1994-05-01), Yu et al.
patent: 5318927 (1994-06-01), Sandhu et al.
patent: 5395801 (1995-03-01), Doan et al.
patent: 5407526 (1995-04-01), Danielson et al.
patent: 5449917 (1995-09-01), Clements
patent: 5516346 (1996-05-01), Cadien et al.
patent: 5543047 (1996-08-01), Stoyell et al.
patent: 5597443 (1997-01-01), Hempel
patent: 5607341 (1997-03-01), Leach
patent: 5607718 (1997-03-01), Sasaki et al.
patent: 5618227 (1997-04-01), Tsutsumi et al.
patent: 5637185 (1997-06-01), Murarka et al.
patent: 5637271 (1997-06-01), Suzuki et al.
patent: 5643053 (1997-07-01), Shendon
patent: 5643406 (1997-07-01), Shimomura et al.
patent: 5645682 (1997-07-01), Skrovan
patent: 5650039 (1997-07-01), Talieh
patent: 5655954 (1997-08-01), Oishi et al.
patent: 5658185 (1997-08-01), Morgan, III et al.
patent: 5665201 (1997-09-01), Sabota
patent: 5700383 (1997-12-01), Feller et al.
patent: 5705435 (1998-01-01), Chen
patent: 5707274 (1998-01-01), Kim et al.
patent: 5709593 (1998-01-01), Guthrie et al.
patent: 5755614 (1998-05-01), Adams et al.
patent: 5791970 (1998-08-01), Yueh
U.S. application No. 09/062,386, Hayden, filed Apr. 17, 1998.

Affiliated with

Also associated with

Rating

Membrane-like filter element for chemical mechanical polishing s does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Membrane-like filter element for chemical mechanical polishing s, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Membrane-like filter element for chemical mechanical polishing s will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-560767