Membrane hydrophone

Details Membrane hydrophone Membrane hydrophone

1993-05-19

1995-01-10

Lobo, Ian J.

Communications, electrical: acoustic wave systems and devices

Signal transducers

Underwater type

310337, 310800, H04R 1700

Patent

active

053813863

ABSTRACT:
A method of fabricating a membrane acoustic device includes utilizing integrated circuit fabrication techniques to form a support structure for a piezoelectric membrane, to pattern interconnect schemes on the membrane and on a semiconductor substrate, and to form electronic components for amplifying and driving signals generated at one or more piezoelectrically strong active areas. The support structure is a lithographically patterned metal layer on the semiconductor substrate. A matching metallization on the piezoelectric membrane is conductively bonded to the metal support structure of the semiconductor substrate. An acoustic cavity area is etched through the semiconductor substrate to the back surface of the membrane. An extremely small membrane hydrophone can thereby be fabricated for operation at frequencies above 50 MHz.

REFERENCES:
patent: 4433400 (1984-02-01), DeReggi et al.
patent: 4653036 (1987-03-01), Harris et al.
patent: 4734611 (1988-03-01), Granz
patent: 4789971 (1988-12-01), Powers et al.
patent: 4906886 (1990-03-01), Breimesser et al.
patent: 5035247 (1991-07-01), Heimann
patent: 5160870 (1992-11-01), Carson et al.
patent: 5189777 (1993-03-01), Guckel et al.
Howe et al., "Silicon micromechanics:sensors & Actuctors on a clip," IEEE Spectrum, Aug. 1990, pp. 29-35.
Brendel, Klaus et al., "Hydrophone Measurements," Ch. 5, Part A, Ultrasonic Exposimetry, Ed. Marvin C. Ziskin et al., CRC Press, pp. 116-125.
DeReggi, A. S. et al., "Piezoelectric polymer probe for ultrasonic applications," J. Acoust. Soc. Am., vol. 69, No. 3, Mar. 1981, pp. 853-859.
Preston, R. C. et al., "PVDF membrane hydrophone performance properties and their relevance to the measurement of the acoustic output of medical ultrasonic equipment," J. Phys. E: Sci. Instrum., vol. 16, 1983, pp. 786-796.

Affiliated with

Also associated with

Rating

Membrane hydrophone does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Membrane hydrophone, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Membrane hydrophone will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-856046