Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to corpuscular radiation
Reexamination Certificate
2011-08-02
2011-08-02
Lebentritt, Michael (Department: 2829)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to corpuscular radiation
C257SE31121
Reexamination Certificate
active
07989250
ABSTRACT:
A method of fabricating a membrane structure for a diffractive phased array assembly is provided. The method includes the steps of providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body, forming a grating pattern on a surface of the membrane layer, and forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane.
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European Search Report mailed Feb. 13, 2009.
Edwards Angell Palmer & & Dodge LLP
Kusumakar Karen
Lebentritt Michael
Rosemount Aerospace Inc.
Wofsy Scott D.
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