Membrane for a MEMS condenser microphone

Details Membrane for a MEMS condenser microphone Membrane for a MEMS condenser microphone

2006-04-25

2011-12-06

Lee, Calvin (Department: 2892)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Responsive to non-optical, non-electrical signal

C257S416000

Reexamination Certificate

active

08072010

ABSTRACT:
A membrane (2) for a microphone (1) is disclosed which comprises a first portion (A1), a second portion (A2), and elements (E1. . . E4, E1′ . . . E4′), which connect said first (A1) and said second portion (A2). The second portion (A2) is arranged for a movement in relation to said first portion (A1) around an idle position, which movement includes at least a translatory component in a direction of movement (dm) normal to said membrane (2). The elements (E1. . . E4, E1′ . . . E4′) are provided for definition of a spring constant for said movement around said idle position and are arranged substantially along the outer border of said second portion (A2).

REFERENCES:
patent: 5146435 (1992-09-01), Bernstein et al.
patent: 2003/0133588 (2003-07-01), Pedersen
patent: 1398298 (2004-03-01), None
patent: 03045110 (2003-05-01), None

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