Membrane deformographic display, and method of making

Details Membrane deformographic display, and method of making Membrane deformographic display, and method of making

1976-06-30

1978-05-02

Trafton, David L.

Communications: electrical

Systems

Portable self-contained

340373, 340378B, 350360, G06K 1518

Patent

active

040878104

ABSTRACT:
A deformographic membrane display system in which a semiconductor substrate, for example silicon, has an insulating layer such as SiO.sub.2 formed thereon with an array of holes formed in the insulating layer. Alternatively, the insulating layer may be omitted, with the holes being formed in the substrate. A reflective membrane, including a thin metal layer, is formed over the surface in which the holes are formed. Electrodes are formed in the silicon substrate directly beneath or in each of the holes. Control circuitry, which for example, may be formed utilizing metal oxide semiconductor field effect transistor (MOSFET) technology and/or bipolar technology, is formed in the silicon substrate for selectively energizing the electrodes. The portion of the membrane over a given hole is deformed in response to the electrode thereunder being energized by the control circuitry.

REFERENCES:
patent: 3323241 (1967-06-01), Blair et al.
patent: 3698012 (1972-10-01), Ensminger et al.
patent: 3798620 (1974-03-01), Cosentino
patent: 3979758 (1976-09-01), Kilby et al.

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