Gas separation: apparatus – Apparatus for selective diffusion of gases – Membrane to degasify liquid
Patent
1995-02-07
1996-12-17
Spitzer, Robert
Gas separation: apparatus
Apparatus for selective diffusion of gases
Membrane to degasify liquid
96 7, 96 9, 55268, B01D 1900
Patent
active
055849148
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to improvement in membrane deaerators for removing dissolved gases in raw water. The deaerator of the present invention is applied to such cooling and heating equipment as boilers, water heaters, and ice makers, or to water supply systems of buildings, food processors, and washing equipment for various parts. The deaerator of the present invention is suitable particularly for washing equipment for electronic parts to which a lower dissolved oxygen concentration level is demanded.
BACKGROUND ART
As is well known, the water supply line to cooling and heating equipment such as boilers has various types of deaeration devices (deoxidizing devices) incorporated therein for the purpose of preventing the interior of the device from corrosion. Those deaeration devices are applausively used in recent years as a countermeasure for the generation of red water in the water supply tubes in architectures such as buildings and apartments.
Also, in recent years, washing systems using deaerated water (especially, deoxidized water) have been receiving attention as a result of seeking a washing method without using CFCs (chlorofluorocarbons) in order to prevent the ozone layer from being damaged by CFCs.
A conventional membrane deaerator for the aforementioned use such as shown in FIG. 19 is known. This deaerator comprises a deaerator module (1') and a flow switch (6') provided in a water supply line (3'), a constant flow rate valve (11'), a seal-water use solenoid valve (12') provided in a seal water supply line (9') between the water supply line (3') and a water sealed vacuum pump (7'), and an evacuation-use solenoid valve (13') provided in a vacuum deaeration line (10') between the deaerator module (1') and the water sealed vacuum pump (7'). Therefore, when water (pure water, tap water, well water, and other industrial water) is supplied to the water supply line (3'), the flow switch (6') is activated to drive the water sealed vacuum pump (7') while the two solenoid valves (12'), (13') are opened, whereby a vacuum deaeration process is performed. Then, with the water supply off, the water sealed vacuum pump (7') is stopped, where the two solenoid valves (12'), (13') are closed.
The deaerator with this constitution is capable of processing at normal temperature advantageously. However, its deaeration level is around 0.5 PPM.
Known deaeration systems using deaerator modules include a "deaerator" described in Japanese Patent Laid-Open Publication No. SHO 51-28261 and another "deaerator" described in Japanese Patent Application No. HEI 4-4003. Several other similar inventions have also been proposed.
Otherwise, a deaeration system (not shown) using a deaeration tower is adopted for production of industrial water in the electronics field. This system, however, has difficulty in supplying processed water of a deaeration level (deoxidizing level) below 10 PPB that is required for washing electronic parts such as recent years' LSIs.
As an effective countermeasure for problems in practical use of the aforementioned conventional deaeration system, it could be conceived that the deaeration performance attributable to the vacuum pump is enhanced by improving the deaeration system using a hollow-fiber module as the deaeration means. To achieve this, the following technical problems need to be solved.
With a system using deaerator modules, for example as for the dissolved oxygen concentration of processed water, if the outside atmospheric pressure of the hollow-fiber membrane within the deaerator module is 30 torr (partial pressure of water vapor: 17.5 torr), then an oxygen concentration of about 8 PPM in raw water can be reduced to 0.5 PPM (at 20.degree. C.). However, in order to obtain a dissolved oxygen concentration of 10 PPB or less, the about 8 PPM oxygen in the raw water must be sucked up in a vacuum state of 18 torr (including partial pressure of water vapor). For this purpose, a water sealed vacuum pump having a capacity about ten times larger than that conventionally used is ne
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Kawakami Yasuhiro
Mitsukami Yasuhito
Miyagama Yasuhiro
Ochi Yasuo
Senoo Yasutoshi
Miura Co., Ltd
Miura Institute of Research & Development Co., Ltd.
Spitzer Robert
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