Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1998-10-15
1999-11-23
Epps, Georgia
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359291, 359292, 359298, G02B 2608, G02B 2602
Patent
active
059910666
ABSTRACT:
An electrostatically actuated micromirror light modulator that exhibits increased deflection range, better charge efficiency and improved electrostatic stability. A thin insulating membrane decouples the electron beam from the micromirror array inside the vacuum cell. The membrane is just thick enough to stop the incident electrons from penetrating through to the mirrors but is thin enough to maintain resolution of the deposited charge pattern. An equipotential layer beneath the mirror array prevents any attractive force from being developed due to the accumulation of static charge on the surface of the light modulator that may otherwise cause the mirror to snap-over and become stuck to the substrate.
REFERENCES:
patent: 2681380 (1954-06-01), Orthuber
patent: 2682010 (1954-06-01), Orthuber
patent: 2733501 (1956-02-01), Orthuber et al.
patent: 3517126 (1970-06-01), Yamada et al.
patent: 3600798 (1971-08-01), Lee
patent: 3678196 (1972-07-01), Roth
patent: 3746785 (1973-07-01), Goodrich
patent: 3746911 (1973-07-01), Nathanson et al.
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 3896338 (1975-07-01), Nathanson et al.
patent: 4229732 (1980-10-01), Hartstein et al.
patent: 4387964 (1983-06-01), Arrazola et al.
patent: 4441791 (1984-04-01), Hornbeck
patent: 4592628 (1986-06-01), Altman et al.
patent: 4615595 (1986-10-01), Hornbeck
patent: 4680579 (1987-07-01), Ott
patent: 4698602 (1987-10-01), Armitage
patent: 4710732 (1987-12-01), Hornbeck
patent: 4728174 (1988-03-01), Grinberg et al.
patent: 4744636 (1988-05-01), Haven et al.
patent: 4765717 (1988-08-01), Buzak et al.
patent: 4784883 (1988-11-01), Chitwood et al.
patent: 4786149 (1988-11-01), Hoenig et al.
patent: 4805038 (1989-02-01), Seligson
patent: 4826293 (1989-05-01), Grinberg et al.
patent: 4884874 (1989-12-01), Buzak et al.
patent: 4956619 (1990-09-01), Hornbeck
patent: 5083857 (1992-01-01), Hornbeck
patent: 5085497 (1992-02-01), Um et al.
patent: 5142405 (1992-08-01), Hornbeck
patent: 5172262 (1992-12-01), Hornbeck
patent: 5196767 (1993-03-01), Leard et al.
patent: 5280277 (1994-01-01), Hornbeck
patent: 5287215 (1994-02-01), Warde et al.
patent: 5416514 (1995-05-01), Janssen et al.
patent: 5442414 (1995-08-01), Janssen et al.
patent: 5444566 (1995-08-01), Gale et al.
patent: 5448314 (1995-09-01), Heimbuch et al.
patent: 5452024 (1995-09-01), Sampsell
patent: 5471341 (1995-11-01), Warde et al.
patent: 5493439 (1996-02-01), Engle
patent: 5504614 (1996-04-01), Webb et al.
patent: 5508738 (1996-04-01), Janssen et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5552925 (1996-09-01), Worley
patent: 5557177 (1996-09-01), Engle
patent: 5567334 (1996-10-01), Baker et al.
patent: 5579151 (1996-11-01), Cho
patent: 5600383 (1997-02-01), Hornbeck
patent: 5631782 (1997-05-01), Smith et al.
patent: 5636070 (1997-06-01), Ji et al.
patent: 5650881 (1997-07-01), Hornbeck
patent: 5669687 (1997-09-01), Yang
patent: 5677784 (1997-10-01), Harris
patent: 5706061 (1998-01-01), Marshall et al.
patent: 5768009 (1998-06-01), Little
patent: 5774196 (1998-06-01), Marshall
patent: 5822110 (1998-10-01), Dabbaj
patent: 5926309 (1999-07-01), Little
Sang-Gook Kim, et al., "Actuated Mirror Array-13 A New Chip-based Display Device for the Ldarge Screen Display," SID Asia Display 1998.
S. Newman, et al., "Development of a 5.1 Inch Field Emission Display," Motorola Flat Panel Display Division, SID 1998.
Lawrence Dworsky, et al., "Field Emission Display Technology and Applications," Motorola Flat Panel Display Division, SID 1998.
B. Chalamala et al., "FED up with Fat Tubes," IEEE Spectrum, vol. 35, No. 4, pp. 41-51; Apr. 1998.
Robert T. Smith, "Electronics Development for Field-Emission Displays," Society for Information Display, SID 1998.
S.T. deZwart et al., "Basic Principles of a New Thin Flat CRT," SID Digest, pp. 239-242; 1997.
A.R. Knox et al., "A Flat-Panel CRT with a Permanent Magnet Aperture Plate," SID Digest, pp. 251-254; 1997.
E. Yamaguchi, et al., "A 10-in. Surface-Conduction Electron-Emitter Display," SID Digest, pp. 52-55, 1997.
C.J. Spindt et al., "ThinCRT.TM. Flat-Panel-Display Construction and Operating Characteristics," SID Digest, pp. 99-102; 1998.
J.A. van Raalte, "A New Schlieren Light Valve for Television Projection," Applied Optics vol. 9, No. 10, (Oct. 1970), p. 2225.
R. Noel Thomas et al., "The Mirror-Matrix Tube: A Novel Light Valve for Projection Displays," IEEE Transactions on Electron Devices, vol. ED-22, No. 9, Sep. 1975, p. 765.
Gifford Eric A.
Little Michael J.
Robinson William P.
Burke Margaret
Epps Georgia
MEMSolutions, Inc.
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