Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Patent
1996-12-05
1999-03-30
Garrett, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
117201, 117202, 117218, 117911, C30B 3500
Patent
active
058882987
ABSTRACT:
A method, mechanisms and jig for handling a member of a crystal pulling apparatus are disclosed. The crystal pulling apparatus grows a single crystal from a melt of a crystalline material by a CZ method. Handling of a graphite crucible or the like of the crystal pulling apparatus, including a vertical moving operation, a swinging operation, or the like, is performed using a crane and a lifting jig. This makes it possible to readily move the member of the crystal pulling apparatus vertically and otherwise without relying on manual labor.
REFERENCES:
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patent: 4523972 (1985-06-01), Cushman et al.
patent: 5407181 (1995-04-01), Ohsawa
patent: 5429341 (1995-07-01), Barczy et al.
patent: 5690734 (1997-11-01), Imaeda et al.
Iwasaki Atsushi
Soeta Satoshi
Takeyasu Shinobu
Yanagimachi Takahiro
Garrett Felisa
Shin-Etsu Handotai & Co., Ltd.
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