MEM micro-structures and methods of making the same

Details MEM micro-structures and methods of making the same MEM micro-structures and methods of making the same

2006-05-16

2006-05-16

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S223100, C359S290000, C359S572000

Reexamination Certificate

active

07046420

ABSTRACT:
A device comprising an array of free metal ribbons that are coupled to a substrate through ceramic support structures is disclosed. The device is preferably an optical MEM device, wherein a first set of free metal ribbons are configured to move relative to a second set of alternating free metal ribbons for modulating an incident light source. An optical MEM system in accordance with the invention includes a light source and suitable optics for transmitting light to and from the array of free metal ribbons. The optical MEM device exhibits reduced surface charging and has applications in optical communications.

REFERENCES:
patent: RE16767 (1927-10-01), Jenkins
patent: RE25169 (1962-05-01), Glenn
patent: 4257053 (1981-03-01), Gilbreath
patent: 4561011 (1985-12-01), Kohara et al.
patent: 5031144 (1991-07-01), Persky
patent: 5061049 (1991-10-01), Hornbeck
patent: 5185823 (1993-02-01), Kaku et al.
patent: D334557 (1993-04-01), Hunter et al.
patent: D334742 (1993-04-01), Hunter et al.
patent: 5206829 (1993-04-01), Thakoor et al.
patent: 5216278 (1993-06-01), Lin et al.
patent: D337320 (1993-07-01), Hunter et al.
patent: 5229597 (1993-07-01), Fukatsu
patent: 5315429 (1994-05-01), Abramov
patent: 5320709 (1994-06-01), Bowden et al.
patent: 5370766 (1994-12-01), Desaigoudar et al.
patent: 5552635 (1996-09-01), Kim et al.
patent: 5832148 (1998-11-01), Yariv
patent: 5835255 (1998-11-01), Miles
patent: 5841929 (1998-11-01), Komatsu et al.
patent: 5844711 (1998-12-01), Long, Jr.
patent: 6012336 (2000-01-01), Eaton et al.
patent: 6096656 (2000-08-01), Matzke et al.
patent: 6154305 (2000-11-01), Dickensheets et al.
patent: 6249381 (2001-06-01), Suganuma
patent: 6282213 (2001-08-01), Gutin et al.
patent: 6313901 (2001-11-01), Cacharelis
patent: 6327071 (2001-12-01), Kimura
patent: 6346430 (2002-02-01), Raj et al.
patent: 6351329 (2002-02-01), Greywall
patent: 6418152 (2002-07-01), Davis
patent: 6438954 (2002-08-01), Goetz et al.
patent: 6445502 (2002-09-01), Islam et al.
patent: 6479811 (2002-11-01), Kruschwitz et al.
patent: 6569717 (2003-05-01), Murade
patent: 6712480 (2004-03-01), Leung et al.
patent: 2002/0135708 (2002-09-01), Murden et al.
patent: 2002/0176151 (2002-11-01), Moon et al.
patent: 2003/0056078 (2003-03-01), Johansson et al.
patent: 32 33 195 (1983-03-01), None
patent: 43 23 799 (1994-01-01), None
patent: 197 23 618 (1997-12-01), None
patent: 197 51 716 (1998-05-01), None
patent: 198 46 532 (2000-05-01), None
patent: 0 089 044 (1983-09-01), None
patent: 0 261 901 (1988-03-01), None
patent: 0 314 437 (1988-10-01), None
patent: 0 304 263 (1989-02-01), None
patent: 0 306 308 (1989-03-01), None
patent: 0 322 714 (1989-07-01), None
patent: 0 627 644 (1990-09-01), None
patent: 0 417 039 (1991-03-01), None
patent: 0 423 513 (1991-04-01), None
patent: 0 436 738 (1991-07-01), None
patent: 0 458 316 (1991-11-01), None
patent: 0 477 566 (1992-04-01), None
patent: 0 488 326 (1992-06-01), None
patent: 0 499 566 (1992-08-01), None
patent: 0 528 646 (1993-02-01), None
patent: 0 530 760 (1993-03-01), None
patent: 0 550 189 (1993-07-01), None
patent: 0 610 665 (1994-08-01), None
patent: 0 627 644 (1994-12-01), None
patent: 0 627 850 (1994-12-01), None
patent: 0 643 314 (1995-03-01), None
patent: 0 654 777 (1995-05-01), None
patent: 0 658 868 (1995-06-01), None
patent: 0 658 830 (1995-12-01), None
patent: 0 689 078 (1995-12-01), None
patent: 0 801 319 (1997-10-01), None
patent: 0 851 492 (1998-07-01), None
patent: 1 003 071 (2000-05-01), None
patent: 1 014 143 (2000-06-01), None
patent: 1 040 927 (2000-10-01), None
patent: 2 117 564 (1983-10-01), None
patent: 2 118 365 (1983-10-01), None
patent: 2 266 385 (1993-10-01), None
patent: 2 296 152 (1996-06-01), None
patent: 2 319 424 (1998-05-01), None
patent: 53-39068 (1978-04-01), None
patent: 55-111151 (1980-08-01), None
patent: 57-31166 (1982-02-01), None
patent: 57-210638 (1982-12-01), None
patent: 60-49638 (1985-03-01), None
patent: 60-94756 (1985-05-01), None
patent: 60-250639 (1985-12-01), None
patent: 61-142750 (1986-06-01), None
patent: 61-145838 (1986-07-01), None
patent: 63-234767 (1988-09-01), None
patent: 63-305323 (1988-12-01), None
patent: 1-155637 (1989-06-01), None
patent: 40-1155637 (1989-06-01), None
patent: 2219092 (1990-08-01), None
patent: 4-333015 (1992-11-01), None
patent: 7-281161 (1995-10-01), None
patent: 3288369 (2002-03-01), None
patent: WO 90/13913 (1990-11-01), None
patent: WO 92/12506 (1992-07-01), None
patent: WO 93/02269 (1993-02-01), None
patent: WO 93/09472 (1993-05-01), None
patent: WO 93/18428 (1993-09-01), None
patent: WO 93/22694 (1993-11-01), None
patent: WO 94/09473 (1994-04-01), None
patent: WO 94/29761 (1994-12-01), None
patent: WO 95/11473 (1995-04-01), None
patent: WO 96/02941 (1996-02-01), None
patent: WO 96/08031 (1996-03-01), None
patent: WO 96/41217 (1996-12-01), None
patent: WO 96/41224 (1996-12-01), None
patent: WO 97/22033 (1997-06-01), None
patent: WO 97/26569 (1997-07-01), None
patent: WO 98/05935 (1998-02-01), None
patent: WO 98/24240 (1998-06-01), None
patent: WO 98/41893 (1998-09-01), None
patent: WO 99/07146 (1999-02-01), None
patent: WO 99/12208 (1999-03-01), None
patent: WO 99/23520 (1999-05-01), None
patent: WO 99/34484 (1999-07-01), None
patent: WO 99/59335 (1999-11-01), None
patent: WO 99/63388 (1999-12-01), None
patent: WO 99/67671 (1999-12-01), None
patent: WO 00/04718 (2000-01-01), None
patent: WO 00/07225 (2000-02-01), None
patent: WO 02/065184 (2000-08-01), None
patent: WO 01/04674 (2001-01-01), None
patent: WO 01/006297 (2001-01-01), None
patent: WO 01/57581 (2001-08-01), None
patent: WO 02/025348 (2002-03-01), None
patent: WO 02/31575 (2002-04-01), None
patent: WO 02/058111 (2002-07-01), None
patent: WO 02/073286 (2002-09-01), None
patent: WO 02/084375 (2002-10-01), None
patent: WO 02/084397 (2002-10-01), None
patent: WO 03/001281 (2003-01-01), None
patent: WO 03/001716 (2003-01-01), None
patent: WO 03/012523 (2003-02-01), None
patent: WO 03/016965 (2003-02-01), None
patent: WO 03/023849 (2003-03-01), None
patent: WO 03/025628 (2003-03-01), None
R. Apte, “Grating Light Valves for High Resolution Displays”, Solid State Sensors and Actuators Workshop, Ph.D. Dissertation, Stanford University (Jun. 1994).
O. Solgaard, “Integrated Semiconductor Light Modulators for Fiber-Optic and Display Applications”, Ph.D. Dissertation, Stanford University Feb., 1992.
J. Neff, “Two-Dimensional Spatial Light Modulators: A Tutorial”, Proceedings of the IEEE, vol. 78, No. 5 (May 1990), pp. 826-855.
R. Gerhard-Multhaupt, “Viscoelastic Spatial Light Modulators and Schlieren-Optical Systems for HDTV Projection Displays” SPIE vol. 1255 Large Screen Projection Displays 11 (1990), pp. 69-78.
R. Gerhard-Multhaupt, “Light-Valve Technologies for High-Definition Television Projection Displays”, Displays vol. 12, No. 3/4 (1991), pp. 115-128.
O. Solgaard, F. Sandejas, and D. Bloom, “Deformable Grating Optical Modulator,” Optics Letters, vol. 17, No. 9, May 1, 1992, New York, USA, pp. 688-690.
F. Sandejas, R. Apte, W. Banyai, and D. Bloom, “Surface Microfabrication of Deformable Grating Valve for High Resolution Displays,” The 7thInternational Conference on Solid-State Sensors and Actuators.
P. Alvelda, “High-Efficiency Color Microdisplays,” SID 95 Digest, pp. 307-311, 1995.
Worboys et al., “Miniature Display Technology for Integrated Helmut Systems,” GEC Journal of Research, vol. 10, No. 2, pp. 111-118, Chelmsford, Essex, GB 1993.
M. Farn et al., “Color Separation by use of Binary Optics,” Optics Letters, vol. 18:15 pp. 1214-1216, 1993.
P. Alveda, “VLSI Microdisplays and Optoelectric Technology,” MIT, pp. 1-93, 1995.
P. Alvelda, “VLSI Microdisplay Technology,” Oct. 14, 1994.
D. Rowe, “Laser Beam Scanning,” SPIE, vol. 2088, Oct. 5, 1993, 18-26.
L. Hornbeck, “Deformable-Mirror Spatial Light Modulators,” Spatial Light Modulators and Applications III, Aug. 8, CA 1989, pp. 86-102.
Russick et al., “Supercritical Carbon

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