Melt-formed polycrystalline ceramics and dopant hosts containing

Details Melt-formed polycrystalline ceramics and dopant hosts containing Melt-formed polycrystalline ceramics and dopant hosts containing

1978-08-14

1979-11-27

Ozaki, G.

Metal treatment

Process of modifying or maintaining internal physical...

Chemical-heat removing or burning of metal

106 396, 106 732, 148 22, 148186, 252950, 252951, H01L 21223

Patent

active

041759885

ABSTRACT:
Disclosed are new polycrystalline ceramic bodies formed from melts containing as essential components P.sub.2 O.sub.5, Ta.sub.2 O.sub.3 and Al.sub.2 O.sub.3 and sometimes containing small amounts of SiO.sub.2. Also disclosed are such bodies in the form of planar dopant hosts for doping silicon or germanium with phosphorus. Methods of making both products are disclosed as well as how to use the dopant hosts in a doping process.

REFERENCES:
patent: 3961969 (1976-01-01), Rapp
patent: 4033790 (1977-07-01), Gunjigake et al.

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