Melt dispensing liquid phase epitaxy boat

Details Melt dispensing liquid phase epitaxy boat Melt dispensing liquid phase epitaxy boat

1984-02-27

1986-03-11

McIntosh, John P.

Coating apparatus

Immersion or work-confined pool type

Work-confined pool

118415, 118421, H01L 21208

Patent

active

045747300

ABSTRACT:
An improved melt dispensing liquid phase epitaxy (LPE) boat is disclosed. It comprises two separable compartments. A supply-melt reservoir and a growth-melt bin separable by means of a separation slider for separating the two compartments prior to the actual process of epitaxial growth. In a further improvement, the substrate holder has a melt collection bin for receiving used growth-melt.

REFERENCES:
patent: 3565702 (1971-02-01), Nelson
patent: 3690965 (1972-09-01), Bergh et al.
patent: 3753801 (1973-08-01), Lockwood et al.
patent: 4123302 (1978-10-01), Marinelli
Paper by L. R. Dawson, entitled: "Liquid Phase Epitaxy (LPE) Techniques for Compound Semiconductor Growth", published 1982 in SPIE, vol. 323, p. 138.
Paper by S. Y. Leung et al, entitled: "Slider Induced Convection in Horizontal Liquid Phase Epitaxy (LPE) System", published 1982 in SPIE, vol. 323, p. 156.
Paper by K, Takahei et al, entitled: "LPE Growth of 1.5-1.6 .mu.m In.sub.1-x Ga.sub.x As.sub.1-y P.sub.y Crystals by a Modified Source-Seed Method", published 1981 in the Journal of Crystal Growth 51, p. 541.

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