Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2006-09-12
2006-09-12
Dougherty, Thomas M. (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S323010, C134S001300
Reexamination Certificate
active
07105985
ABSTRACT:
A transducer comprised of a resonator and a piezoelectric crystal for cleaning single items such as semiconductor wafers and flat panel displays. The resonator is an elongated piece of material having a cross section that is trapezoidal in shape. The parallel sides of the trapezoid form the top and bottom ends of the resonator and the nonparallel sides of the trapezoid focus the acoustic energy on the bottom end of the resonator.
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“MHz Ultrasonic Silicon Cleaning Tool”, IBM Technical Disclosure Bulletin, vol. 37, No. 06A, p. 585 (Jun. 1, 1994.
Beck Mark J.
Vennerbeck Richard B.
Dougherty Thomas M.
Pagel Donald J.
Product Systems Incorporated
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