Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1993-07-21
1994-10-11
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310327, 310340, 134134, H01L 4108
Patent
active
053550480
ABSTRACT:
A megasonic transducer for generating and transmitting megasonic acoustic energy into a water based liquid solution for cleaning particles from substrates immersed in the solution, and having piezo crystals connected to a high frequency electrical power supply and generating 0.5 Megahertz to 2.0 Megahertz acoustic energy, a rigid backing layer secured to the back sides of the crystals by a bonding layer, both the backing layer and the bonding layer having thicknesses approximately equaling an odd number of one-quarter wavelengths of the megasonic frequency being propagated in the backing and bonding layers, a quartz isolation layer between the front faces of the piezo crystals and the liquid solution and having a thickness approximately equaling an even number of one-quarter wavelengths of the megasonic frequency propagated in the isolation layer, an encapsulation layer of an electrically insulating material with an acoustical impedance of less than water and free of air bubbles and applied onto the front faces of the piezo crystals, the encapsulation layer having a thickness substantially equaling an odd number of one-quarter wavelengths of the megasonic frequency propagated in the encapsulation layer, and a deionized water coupling layer flowing between the encapsulation layer and the isolation layer and having a thickness substantially equaling an even number of one-quarter wavelengths of the megasonic frequency propagated in the liquid coupling layer.
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Budd Mark O.
FSI International Inc.
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