Megasonic cleaning using supersaturated cleaning solution

Details Megasonic cleaning using supersaturated cleaning solution Megasonic cleaning using supersaturated cleaning solution

2007-01-02

2007-01-02

Kornakov, M. (Department: 1746)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

C134S001000, C134S034000, C134S042000, C438S906000

Reexamination Certificate

active

10864929

ABSTRACT:
A method and system for the megasonic cleaning of one or more substrates that reduces damage to the substrate(s) resulting from the megasonic energy. The substrates are supported in a process chamber and contacted with a cleaning solution comprising a cleaning liquid having carbon dioxide gas dissolved in the cleaning liquid in such amounts that the carbon dioxide gas is at a supersaturated concentration for the conditions within the process chamber. Megasonic energy is then transmitted to the substrate. The cleaning solution provides protection from damage resulting from the application of megasonic/acoustical energy. In another aspect, the invention is a system for carrying out the method. The invention is not limited to carbon dioxide but can be used in conjunction with any gas that, when so dissolved in a cleaning liquid, protects substrates from being damaged by the application of megasonic/acoustical energy.

REFERENCES:
patent: 4537511 (1985-08-01), Frei
patent: 5427622 (1995-06-01), Stanasolovich et al.
patent: 5525237 (1996-06-01), Birbara et al.
patent: 5656097 (1997-08-01), Olesen et al.
patent: 5800626 (1998-09-01), Cohen et al.
patent: 5849091 (1998-12-01), Skrovan et al.
patent: 6039059 (2000-03-01), Bran
patent: 6039814 (2000-03-01), Ohmi et al.
patent: 6140744 (2000-10-01), Bran
patent: 6167891 (2001-01-01), Kudelka et al.
patent: 6295998 (2001-10-01), Kudelka et al.
patent: 6325081 (2001-12-01), Miki et al.
patent: 6450181 (2002-09-01), Morita et al.
patent: 6539952 (2003-04-01), Itzkowitz
patent: 6648307 (2003-11-01), Nelson et al.
patent: 6684890 (2004-02-01), Nicolosi et al.
patent: 6921063 (2005-07-01), Ozawa et al.
patent: 6946399 (2005-09-01), Lorimer
patent: 6997192 (2006-02-01), Doke et al.
patent: 2002/0029788 (2002-03-01), Verhaverbeke et al.
patent: 2003/0015216 (2003-01-01), Nicolosi et al.
patent: 2003/0024547 (2003-02-01), Bran et al.
patent: 2004/0139982 (2004-07-01), Nicolosi et al.
patent: 2004/0168707 (2004-09-01), Bran et al.
patent: 2005/0087209 (2005-04-01), Nicolosi et al.
patent: S61-16528 (1985-01-01), None
patent: 09-213666 (1997-08-01), None
patent: 11008214 (1999-01-01), None
patent: 2000058496 (2000-02-01), None
patent: 2000-150439 (2000-05-01), None
patent: 2003325902 (2000-11-01), None
patent: WO98/01896 (1997-03-01), None
“Study on Megasonic in Advanced Wet Cleaning Process,” Electrochemical Society Proceedings vol. 95-2D Oct. 1995.
Nicolosi et al., Front End of Line Wet Processing for Advanced Critical Cleans Electrochemical Society Proceedings Hololulu (1999).
Yi Wu Development of an Experimentally Validated Model of Megasonic Cleaning.: Doctoral Thesis 1997.
Ultra Pure Water Monitoring Guideliness (2000) Balaza Analytical Laboratory. 1999.

Affiliated with

Also associated with

Rating

Megasonic cleaning using supersaturated cleaning solution does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Megasonic cleaning using supersaturated cleaning solution, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Megasonic cleaning using supersaturated cleaning solution will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3738591