Megasonic cleaning system

Details Megasonic cleaning system Megasonic cleaning system

1994-10-03

1996-07-09

Kastler, Scott

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134184, B08B 312

Patent

active

055340768

ABSTRACT:
A transducer is bonded to a metal carrier that is mounted on an elastomeric frame-like diaphragm. The outer periphery of the diaphragm is mounted on a frame bonded to the bottom of a quartz tank. A vacuum applied to a chamber surrounding the lower portion of the carrier draws the carrier against the tank bottom with a compliant interface between the tank and the carrier. A cover clamps the diaphragm to the support and creates a coolant chamber with the diaphragm and the carrier for cooling the transducer. In other arrangements, resilient material or springs are employed to produce a force to compress the interface against the tank. Also the weight of the tank can produce compressive force on the interface.

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