Megasonic cleaning method

Details Megasonic cleaning method Megasonic cleaning method

1990-02-15

1991-08-06

Pal, Asok

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134105, 134184, 134201, B08B 900

Patent

active

050374818

ABSTRACT:
A transducer array for use in a megasonic cleaning system including a transmitter element made of a material which will efficiently transmit megasonic energy when bonded to one conductive surface of a transducer. In one form, the transmitter and the transducer are flat plates. In another form, a flat transducer is bonded to a solid semi-cylindrical transmitter which causes the megasonic energy pattern to diverge. In another form, the transmitter is a semi-cylindrical shell or is tubular, and the transducer is bonded to and curved to conform to the transmitter. The transducer extends about 120.degree., and produces a straight line of sight diverging energy pattern.

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