Megasonic cleaning apparatus and method

Details Megasonic cleaning apparatus and method Megasonic cleaning apparatus and method

1984-08-28

1985-09-24

Caroff, Marc L.

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134 18, 134113, 134184, B08B 312

Patent

active

045431302

ABSTRACT:
Cleaning apparatus for cleaning semiconductor wafers and the like in a chamber of cleaning fluid vibrating at ultrasonic (megasonic) frequencies utilizing an electrically energized transducer, such as a piezoelectric crystal, mounted on a conductive foil formed of tantalum or zirconium. Pinholes or other ruptures in the foil can cause high energy arcs capable of exploding vapors of inflammable solvents. The foil carrying the transducers is isolated from the cleaning fluid vapors by a closed buffer chamber containing an inert liquid that couples vibratory energy to the cleaning fluid and another closed chamber enclosing the transducers. Accordingly, cleaning fluids, such as the acetones, alcohols and ketones, heretofore considered hazardous fluids, can be used in the apparatus.

REFERENCES:
patent: 2760501 (1956-08-01), Gander
patent: 2828231 (1958-03-01), Henry
patent: 3073578 (1963-01-01), Jeffrey
patent: 3240963 (1966-03-01), Sasaki
patent: 3318578 (1967-05-01), Branson
patent: 3405916 (1968-10-01), Carmichael
patent: 3520724 (1970-07-01), Massa
patent: 3893869 (1978-07-01), Mayer et al.
patent: 4118649 (1978-10-01), Shwartzman et al.
patent: 4167424 (1979-09-01), Jubenville et al.
patent: 4367098 (1983-01-01), McCord
patent: 4375991 (1983-03-01), Sachs et al.
patent: 4441517 (1984-04-01), Phillips

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