Drying and gas or vapor contact with solids – Apparatus – With fluid current conveying of treated material
Reexamination Certificate
2005-08-16
2005-08-16
Bennett, Henry (Department: 3743)
Drying and gas or vapor contact with solids
Apparatus
With fluid current conveying of treated material
C034S317000, C034S058000, C034S667000, C034S337000, C134S001000, C134S001300, C134S095300, C134S184000, C134S198000
Reexamination Certificate
active
06928751
ABSTRACT:
An apparatus includes a rotatable chuck for supporting a substrate and a splash guard. The splash guard surrounds the chuck and surrounds a substrate mounted on the chuck. The splash guard has a portion that deflects fluid being flung off the substrate by centrifugal action in a manner so as to not splash back onto the substrate. The splash guard is moveable between a process position in which the upper annular edge of the splash guard extends above the chuck and a substrate on the chuck, and a load/unload position in which the splash guard is tilted so that one side of the upper annular edge is below an upper edge of the chuck. The movement of the splash guard facilitates loading and unloading of a substrate.
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Bran Mario E.
Doumen Geert
Hosack Chad M.
Lauerhaas Jeffrey M.
Mertens Paul
Belles Brian L.
Bennett Henry
Fein Michael B.
Goldfinger Technologies, LLC
Interuniversitair Microelektronica Centrum (IMEC)
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