Megasonic cleaner and dryer

Details Megasonic cleaner and dryer Megasonic cleaner and dryer

2006-09-05

2006-09-05

Bennett, Henry (Department: 3743)

Drying and gas or vapor contact with solids

Process

By centrifugal force

C034S058000, C134S095200

Reexamination Certificate

active

07100304

ABSTRACT:
An apparatus for drying a generally flat substrate that has been cleaned has a rotatable support for supporting the substrate, a substrate drying assembly, and a controller. The substrate drying assembly includes a substrate drying assembly support arm, an outlet for applying liquid to an upper surface of the substrate, and an outlet for applying a drying vapor to the upper surface of the substrate. The substrate drying assembly is configured to position the liquid applying outlet and to position the vapor applying outlet above a portion of the substrate. The controller causes the substrate drying assembly to be retracted over the upper surface of the substrate at a faster rate near a center of the substrate than near a periphery of the substrate.

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