Measuring and testing – Fluid pressure gauge – With protective separator
Patent
1986-07-28
1988-09-27
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
With protective separator
73721, 73DIG4, 338 4, G01L 708, G01L 906
Patent
active
047732695
ABSTRACT:
A deflecting diaphragm differential pressure sensor is formed so all electrical elements and connections from external circuitry to the sensor are isolated from the pressure media. The deflecting, pressure sensing diaphragm is made of a semi-conductor material, having piezoresistors disposed on a surface thereof to form strain gages to sense deflection of the diaphragm. The strain gage resistors are media isolated by a layer that overlies the strain gage resistors. All forms of the invention provide environmental protection for the electrical connections for external circuitry, which are subject to corrosion from the pressure media.
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FIG. 4 of Article "Sensor ICs: Processing, Materials Open Factory Door," Electronic Design, Apr. 18, 1985, pp. 131-148.
Knecht Thomas A.
Romo Mark G.
Rosemount Inc.
Woodiel Donald O.
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