Mechanism to prevent self-actuation in a...

Details Mechanism to prevent self-actuation in a... Mechanism to prevent self-actuation in a...

2006-05-09

2006-05-09

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Plural channel systems

Having branched circuits

C333S262000

Reexamination Certificate

active

07042308

ABSTRACT:
According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate, a bottom electrode mounted on the substrate, a top electrode mounted on the bottom electrode, an actuation electrode mounted on the substrate and a resistor coupled to the actuation electrode. The resistor prevents self-actuation at the actuation electrode whenever the switch is open.

REFERENCES:
patent: 6310339 (2001-10-01), Hsu et al.
patent: 6417807 (2002-07-01), Hsu et al.
patent: 6639494 (2003-10-01), Bluzer
patent: 6777765 (2004-08-01), Chen et al.
patent: 40 08 832 (1991-07-01), None
patent: 199 50 373 (2000-04-01), None
patent: 1 156 504 (2001-11-01), None
patent: 1 288 977 (2003-03-01), None
PCT Search Report, mailed Oct. 28, 2005, PCT/US2005/022357.

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