Mechanism for turning over a test head of a wafer probing machin

Details Mechanism for turning over a test head of a wafer probing machin Mechanism for turning over a test head of a wafer probing machin

1988-08-05

1989-10-17

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 73PC, 414758, 414917, G01R 3102, B25B 1100

Patent

active

048750050

ABSTRACT:
A mechanism according to the present invention comprises a quadric crank chain disposed substantially within a vertical plane to support a test head of wafer probing machine, a cylinder mechanism coupled to a first movable link corresponding to the side opposite to a fixed link of the quadric crank chain, the cylinder mechanism serving to slide the first movable link in a vertical direction, and a guide member for supportingly guiding the cylinder mechanism in a horizontal direction. The test head is attached to a second movable link, which corresponds to a side adjacent to the fixed link of the quadric crank chain, so that the test head, along with the second movable link, revolves within the vertical plane when the first movable link slides vertically.

REFERENCES:
patent: 4411587 (1983-10-01), Niki
patent: 4715775 (1987-12-01), Amino

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