Coating apparatus – With indicating – testing – inspecting – or measuring means – With means for visual observation
Patent
1997-08-27
2000-03-14
Parker, Fred J.
Coating apparatus
With indicating, testing, inspecting, or measuring means
With means for visual observation
118715, 118719, C23C 1600
Patent
active
060367806
ABSTRACT:
A fluid delivery system is provided having a degas module which can be retrofitted to allow early detection of degas defects within the system. A degas chamber is modifiable to include at least one view port into which an operator can visually examine leaks within a fluid-carrying tube existing exclusively within the degas chamber. Liquid leaking from the tube, or particles possibly entering the tube, can be readily detected through the view port prior to harming any downstream processing operations. In addition to the view port, a purge port can be provided through which a purge gas is transmitted during times when potential backstreaming can occur. The purge gas alleviates unwanted gases from interacting with the volatile leaking liquid. This helps minimize particulate formation in or around the leak and, specifically, particulates entrained within the liquid forwarded to the downstream processing tool. Accordingly, the fluid delivery system is one which can readily detect and therefore prevent unwanted particles from traveling to a processing tool which relies upon pure liquid delivery.
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Helm John Thomas
Medlin Arthur E.
Cypress Semiconductor Corporation
Daffer Kevin L.
Parker Fred J.
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