Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent
1998-11-05
1999-10-19
Warden, Jill
Cleaning and liquid contact with solids
Processes
Using solid work treating agents
15 4, 15 211, 15 971, 15114, 324754, 324761, 134 8, 134 18, 134 221, 134 2211, 134 255, 134 40, B08B 100
Patent
active
059682825
ABSTRACT:
A cleaning mechanism and method for cleaning the probe needles of a probe card used for the inspection of the electric characteristics of a wafer W. This mechanism is provided with a soft cleaner and a brush cleaner. The soft cleaner has a cleaner layer formed of rubber and inorganic filler. The brush cleaner has a number of brush sections, and each brush section is a bundle of fiber members. The fiber members are thinner than the probe needles and have a certain degree of elasticity. The cleaning method includes the steps of: a) cleaning the probe needles using the soft cleaner having a the cleaning layer made of rubber and inorganic filler and b) cleaning the probe needles using the brush cleaner having bristles.
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Carrillo S.
Tokyo Electron Limited
Warden Jill
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