Mechanically balanced microwave load pull tuner

Details Mechanically balanced microwave load pull tuner Mechanically balanced microwave load pull tuner

2006-09-05

2006-09-05

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Automatically controlled systems

C333S017300, C333S263000, C324S613000, C324S642000

Reexamination Certificate

active

07102457

ABSTRACT:
A mechanically balanced automatic microwave tuner is used in on-wafer device testing. Using low loss rigid airlines to connect the tuner and the devices improves the tuning range at the DUT reference plane but causes mechanical movements of the wafer probes, when the tuner mobile carriage moves horizontally. Balancing the tuner by means of exactly positioned and dimensioned mobile counterweights, driven by the same mechanism as the tuner carriage itself, allows for compensation of the probe movement and safe on wafer operation.

REFERENCES:
patent: 6297649 (2001-10-01), Tsironis
patent: 6515465 (2003-02-01), Kiyokawa et al.
patent: 6674293 (2004-01-01), Tsironis
patent: 2003/0132759 (2003-07-01), Tsironis
patent: 11-6855 (1999-01-01), None
patent: 2001-33512 (2001-02-01), None
Christos Tsironis, “System Performs Active Load-Pull Measurements”, Microwaves & RF, Nov. 1995, p. 102-108.

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