Mechanical sensor for detecting stress or distortion with high s

Electricity: measuring and testing – Magnetic – Stress in material measurement

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73776, G01L 100

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active

055897703

ABSTRACT:
A mechanical sensor, comprising a ferromagnetic layer having magnetostriction, a ferromagnetic layer having magneto-resistance effect, a magnetic field generating means which excites these ferromagnetic layers, and a substrate which supports all these elements integrally, can be attained, which is small, thin, highly sensitive, and is capable of integration, by detecting a change of magnetic flux density passing through the ferromagnetic layers resulting from a change of magnetic properties caused by stress as a change of resistance value arising from magneto-resistance effect. As a result, a small, thin, and highly sensitive mechanical sensor can be provided using stress magnetic effect. Furthermore, based on the anisotropy of detection sensitivity, intensity of the stress along a certain direction can be detected selectively.

REFERENCES:
patent: 4884453 (1989-12-01), Hoffman et al.

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