Mechanical self-reciprocating oscillator and mechanism and a...

Oscillators – Electromechanical resonator

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C333S186000, C310S306000, C310S309000, C060S527000, C073S105000, C355S078000

Reexamination Certificate

active

07456698

ABSTRACT:
A mechanical self-reciprocating oscillator and mechanism and method for establishing and maintaining regular back and forth movement of a micromachined device without the aid of any electronic components are provided. The fully mechanical micromachined oscillator and mechanism are driven using only a DC power source on at least one substrate such as a semiconductor chip. The oscillator and mechanism preferably include an electrothermal actuator, that, when actuated, opens a switch to cut off supply current to the actuator. Two versions of the oscillator and mechanism are provided using distinct hysteresis mechanisms, one structural and the other thermal.

REFERENCES:
patent: 5914553 (1999-06-01), Adams et al.
patent: 6594994 (2003-07-01), Gianchandani et al.
Tang, W., et al., Electrostatic Comb-Drive of Lateral Polysilicon Resonators, Sensors and Actuators A (Physical), v A21, n 1-3, Feb. 1990, pp. 328-331.
Zeng, S., et al., Fabrication and Characterization of Electrokinetic Micro Pumps, Thermomechanical Phenomena in Electronic System, v 2, 2000, pp. 31-36.
Wilson, C., et al., Spectral Detection of Metal Contaminants in Water Using an On-Chip Microglow Discharge, IEEE Trans. Electron Devices, v 49, n 12, Dec. 2002, pp. 2317-2322.
Lee, J., et al., A Miniaturized High-Voltage Solar Cell Array as an Electrostatic MEMS Power Supply, J. MEMS, v 4, Sep. 1995, pp. 102-108.
Bates, J., et al., Rechargeable Solid State Lithium Microbatteries, IEEE MEMS, 1993, pp. 82-86.
Jiang, H., et al., On-Chip Integration of High-Voltage Generator Circuits for an Electrostatic Micromotor, Intl. Conf. on Solid-State Sensors and Actuators, v 1, 1995, pp. 150-153.
Ahn, C., et al., A Comparison of Two Micromachined Inductors (Bar and Meander-Type) for Fully Integrated Boost DC/DC Power Converters, IEEE Transactions on Power Electronics, v 11, n 2, Mar. 1996, pp. 239-245.
Skidmore, G., et al., Assembly Technology Across Multiple Length Scales From the Micro-Scale to the Nano-Scale, IEEE MEMS, 2004, pp. 588-592.
Armagnat, H., The Theory, Design and Construction of Induction Coils, New York, McGraw Publishing Company, 1908.
Jaeger, R., Microelectronic Circuit Design, McGraw-Hill, 1997.
Udeshi, K., et al., A DC-Powered, Tunable, Fully Mechanical Oscillator Using In-Plane Electrothermal Actuation, IEEE MEMS, 2004, pp. 502-506.
Mohan, N., et al., Power Electronics: Converters, Applications, and Design, New York, John Wiley & Sons, Inc., 1995.
Flanagan, W., Handbook of Transformer Design and Applications, McGraw-Hill, Inc., 1993.
Lorents, H., et al., SU-8: A Low Cost Negative Resist for MEMS, J. Micromech. Microeng., v 7, n 3, 1997, pp. 121-124.
Stewart, J., et al., Theory and Design of Capacitor-Storage Ignition Systems, Technical Report, University of Michigan, Ann Arbor, 1956.
Burns, D., et al., Sealed-Cavity Resonant Microbeam Pressure Sensor, Sensors and Actuators, A: Physical, v 48, n 3, May 30, 1995, pp. 179-186.
Roessig, T., et al., Surface-Micromachined Resonant Accelerometer, International Conference on Solid-State Sensors & Actuators, Proc., v 2, 1997, pp. 859-862.
Putty, M., et al., A Micromachined Vibrating Ring Gyroscope, Solid-State Sensor & Act. Workshop, 1994, pp. 213-220.
Nguyen, C., High-Q Micromechanical Oscillators and Filters for Communications, 1997 IEEE International Symposium on Circuits and Systems, 1997, pp. 2825-2828.
Dec, A., et al., Microwave MEMS-Based Voltage-Controlled Oscillators, IEEE Transactions on Microwave Theory and Techniques, v 48, n 11, Nov. 2000, pp. 1943-1949.
Que, L., et al., Bent-Beam Electro-Thermal Actuators for High Force Applications, IEEE International MEMS, 1999, pp. 31-36.
Jensen, B., et al., Design Optimization of a Fully-Compliant Bistable Micro-Mechanism, ASME International Mechanical Engineering Congress and Exposition, 2001, pp. 357-363.
Chu, L., Feedback Controllable ID and 2D Micro Positioners Using Electrothermal Actuators and Capacitive Displacement Sensors, Ph.D. Dissertation, Univ. of Wisconsin-Madison, 2003.
Lorents, H., et al., SU-8: A Low-Cost Negative Resist for MEMS, J. Micromech. Microeng. 7, 1997, pp. 121-124.
Park, J., et al., Long Throw and Rotary Output Electro-Thermal Actuators Based on Bent-Beam Suspensions, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 2000, pp. 680-685.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Mechanical self-reciprocating oscillator and mechanism and a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mechanical self-reciprocating oscillator and mechanism and a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mechanical self-reciprocating oscillator and mechanism and a... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4037327

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.